Low Offset, Low Noise, Variable Gain Interfacing Circuit with a Novel Scheme for Sensor Sensitivity and Offset Compensation for MEMS Based, Wheatstone Bridge Type, Resistive Smart Sensor

Author

Dutta, Anupam ; Bhattacharyya, T.K.

Author_Institution

Dept. of Electron. & Electr. Commun. Eng., IIT Kharagpur, Kharagpur, India

fYear

2011

fDate

2-7 Jan. 2011

Firstpage

322

Lastpage

327

Abstract

A fully-analog, on-chip, low input offset, low noise, variable gain instrumentation amplifier with a new scheme for nonlinear and dynamic temperature compensation of sensor sensitivity and offset, is designed in 0.18μm commercial CMOS process. The system has a scalable system bandwidth up to 5kHz, a dynamic range of 84dB, and a maximum gain of 104dB. All the sensor non idealities and CMOS process mismatch have been incorporated in simulation. Using this interfacing circuit, a smart MEMS piezoresistive accelerometer has been designed subsequently.

Keywords

CMOS analogue integrated circuits; accelerometers; instrumentation amplifiers; low noise amplifiers; microsensors; piezoresistive devices; CMOS process; MEMS piezoresistive accelerometer; Wheatstone bridge type; dynamic temperature compensation; gain 104 dB; gain 84 dB; offset compensation; resistive smart sensor; sensor sensitivity; size 0.18 mum; variable gain instrumentation amplifier; variable gain interfacing circuit; Acceleration; Accelerometers; Bridge circuits; Micromechanical devices; Noise; Sensitivity; Temperature sensors; accelerometer; auto-zero; chopping; instrumentation amplifier; low noise; low offset; sensor temperature compensation; smart MEMS;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Design (VLSI Design), 2011 24th International Conference on

Conference_Location

Chennai

ISSN

1063-9667

Print_ISBN

978-1-61284-327-8

Electronic_ISBN

1063-9667

Type

conf

DOI

10.1109/VLSID.2011.39

Filename

5718822