Title :
Regional observability of a thermal system
Author :
Zerrik, E. ; Simon, M.C. ; Amouroux, M.
Author_Institution :
IMP, Perpignan Univ., France
Abstract :
The realization of a ceramic protector covering the subregion of a substrate and the use of chemical vapor deposition technique require the temperature field in the deposition zone to be controlled. A feedback control of this temperature is based on the knowledge of the temperature in the considered subregion. The difficulty which occurs is due to the fact that measurements can only be obtained out of the deposition zone. The purpose of this paper is to give an original approach for the reconstruction of the state in the deposition subregion
Keywords :
chemical vapour deposition; feedback; heat systems; observability; process control; substrates; temperature control; ceramic protector; chemical vapor deposition; deposition zone; feedback control; regional observability; substrate; temperature control; thermal system; Differential equations; Observability; Q measurement; Reconstruction algorithms; Sensor systems; State-space methods; Time measurement;
Conference_Titel :
Systems, Man and Cybernetics, 1993. 'Systems Engineering in the Service of Humans', Conference Proceedings., International Conference on
Conference_Location :
Le Touquet
Print_ISBN :
0-7803-0911-1
DOI :
10.1109/ICSMC.1993.390822
