Title :
Nanostructured copper(II) oxide thin film for alcohol sensing
Author :
Parmar, Mitesh R ; Gokhale, Nikhil ; Rajanna, K.
Author_Institution :
Dept. of Instrum., Indian Inst. of Sci., Bangalore, India
Abstract :
Nanostructured copper(II) oxide film was deposited using reactive DC magnetron sputtering. It has been characterized using XRD, EDAX, XPS, and FESEM. The grain size of copper oxide film was found to be 40-65 nm with size distribution. The entire study was divided into two parts. In the first part, the film has been studied for its response to alcohol at different temperatures to find the optimum sensing temperature, whereas in the second part, the film sensitivity to different alcohol concentrations were studied at fixed optimum operating temperature. The optimum temperature for the response of ethanol was observed to be 400°C, and the response for different concentrations was found to be almost linear.
Keywords :
X-ray chemical analysis; X-ray diffraction; X-ray photoelectron spectra; chemical sensors; copper compounds; nanosensors; nanostructured materials; organic compounds; scanning electron microscopy; sputtered coatings; thin film sensors; CuO; EDAX; FESEM; XPS; XRD; alcohol sensing; ethanol sensor; film sensitivity; grain size; nanostructured copper(II) oxide thin film; reactive DC magnetron sputtering; size 40 nm to 65 nm; temperature 400 C; Copper; Ethanol; Grain size; Semiconductivity; Semiconductor materials; Sputtering; Substrates; Temperature sensors; Transistors; X-ray scattering; EDAX ZAF Quantification; FESEM; Nanostructured Copper(II) oxide; XPS;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 2009. I2MTC '09. IEEE
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-3352-0
DOI :
10.1109/IMTC.2009.5168471
