Synthetic quasi-TEM transmission lines with dummy fills for CMOS miniaturized microwave integrated circuit

Summary form only given, as follows. This paper reports a synthetic transmission line with dummy fills in the CMOS 0.13 um process. The synthetic TL consists of a single trace and a mesh ground plane. The dummy metals are beneath the signal trace. The measured results show this TL with the dummy fills can synthesize the characteristic impedance from 35 to 70 ohm without degrading the Q-factor. The K-band CMOS amplifier incorporating this TL demonstrates its miniaturization, and confirms the neglected impacts on the performances.