• DocumentCode
    2596793
  • Title

    Numerical Modeling Of Optical Metrology Schemes For IC Line-width Measurements

  • Author

    Yuan, Chi-Min ; Strojwas, Andrzej J.

  • Author_Institution
    Carnegie Mellon University
  • fYear
    1990
  • fDate
    3-4 Jun 1990
  • Firstpage
    3
  • Lastpage
    4
  • Keywords
    Electric variables measurement; Integrated circuit modeling; Interference; Light scattering; Metrology; Numerical models; Optical scattering; Photonic integrated circuits; Size measurement; Wavelength measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on
  • Type

    conf

  • DOI
    10.1109/NUPAD.1990.748248
  • Filename
    748248
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2596793