Title :
Segment Based Etch Algorithm And Modeling
Author :
Thurgate, Tim ; Pack, Bob
Author_Institution :
Intel Corporation
Keywords :
Anisotropic magnetoresistance; Data structures; Etching;
Conference_Titel :
Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on
DOI :
10.1109/NUPAD.1990.748249
