DocumentCode

2596810

Title

Segment Based Etch Algorithm And Modeling

Author

Thurgate, Tim ; Pack, Bob

Author_Institution

Intel Corporation

fYear

1990

fDate

3-4 Jun 1990

Firstpage

5

Lastpage

6

Keywords

Anisotropic magnetoresistance; Data structures; Etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on

Type

conf

DOI

10.1109/NUPAD.1990.748249

Filename

748249