Title :
Parameters For Point Defect Diffusion And Recombination
Author_Institution :
University of Florida
Keywords :
Biomembranes; Boundary conditions; Data mining; Difference equations; Gettering; Impurities; Oxidation; Semiconductor process modeling; Silicon; Surface fitting;
Conference_Titel :
Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on
DOI :
10.1109/NUPAD.1990.748251
