DocumentCode
2596853
Title
Parameters For Point Defect Diffusion And Recombination
Author
Law, Mark E.
Author_Institution
University of Florida
fYear
1990
fDate
3-4 Jun 1990
Firstpage
9
Lastpage
10
Keywords
Biomembranes; Boundary conditions; Data mining; Difference equations; Gettering; Impurities; Oxidation; Semiconductor process modeling; Silicon; Surface fitting;
fLanguage
English
Publisher
ieee
Conference_Titel
Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on
Type
conf
DOI
10.1109/NUPAD.1990.748251
Filename
748251
Link To Document