2596883

Intelligent Simulation for OPtimization of Fabrication Processes

Wenstrand, J.S. ; Iwai, H. ; Norishima, M. ; Tanimoto, H. ; Wada, T. ; Dutton, R.W.

Stanford University

1990

3-4 Jun 1990

15

16

Analytical models; BiCMOS integrated circuits; Calibration; Computational modeling; Design optimization; Fabrication; Implants; Object oriented modeling; Personal digital assistants; Process design;

English

ieee

Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on

conf

10.1109/NUPAD.1990.748254

748254