• DocumentCode
    2596883
  • Title

    Intelligent Simulation for OPtimization of Fabrication Processes

  • Author

    Wenstrand, J.S. ; Iwai, H. ; Norishima, M. ; Tanimoto, H. ; Wada, T. ; Dutton, R.W.

  • Author_Institution
    Stanford University
  • fYear
    1990
  • fDate
    3-4 Jun 1990
  • Firstpage
    15
  • Lastpage
    16
  • Keywords
    Analytical models; BiCMOS integrated circuits; Calibration; Computational modeling; Design optimization; Fabrication; Implants; Object oriented modeling; Personal digital assistants; Process design;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on
  • Type

    conf

  • DOI
    10.1109/NUPAD.1990.748254
  • Filename
    748254
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2596883