Title :
A macromodeling Approach To Process Simulator Tuning
Author :
Brockman, Jay B. ; Director, Stephen W.
Author_Institution :
Carnegie Mellon University
Keywords :
Circuit optimization; Circuit simulation; Computational modeling; Covariance matrix; Electric variables measurement; Fabrication; Fabrics; Fluctuations; Manufacturing processes; Performance evaluation;
Conference_Titel :
Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on
DOI :
10.1109/NUPAD.1990.748255
