Title :
Surface activated bonding of Si/Ce:YIG for waveguide optical isolators
Author :
Shoji, Yuya ; Ito, Masatoshi ; Shirato, Yuya ; Mizumoto, Tetsuya
Author_Institution :
Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Tokyo, Japan
Abstract :
We investigate surface activated bonding of magneto-optic garnet, Ce:YIG on silicon for waveguide optical isolators. An interlayer between Si and Ce:YIG can reduce nonreciprocal phase shift. We achieve direct bonding of Si/Ce:YIG with N2 plasma to obtain efficient nonreciprocal phase shift, and fabricate a waveguide optical isolator with Si-wire waveguides.
Keywords :
adhesive bonding; cerium; elemental semiconductors; garnets; integrated optics; magneto-optical isolators; optical fabrication; optical phase shifters; optical waveguides; plasma materials processing; silicon; yttrium compounds; N2 plasma; Si-wire waveguides; YIG:Ce-Si; direct bonding; interlayer; magneto-optic garnet; nonreciprocal phase shift; surface activated bonding; waveguide optical isolators; Bonding; Isolators; Magnetooptic effects; Optical device fabrication; Optical waveguides; Plasmas; Silicon;
Conference_Titel :
Low Temperature Bonding for 3D Integration (LTB-3D), 2012 3rd IEEE International Workshop on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4673-0743-7
DOI :
10.1109/LTB-3D.2012.6238059
