2597235

Saturn - A Device Engineer´s Tool For Optimizing Mosfet Performance And Lifetime

Jacobs, H. ; Hinsch, W. ; Hofmann, F. ; Jacobs, W. ; Paffrath, M. ; Rank, E. ; Steger, K. ; Weinert, U.

Silicon Process Technology

1990

3-4 Jun 1990

55

56

Circuit simulation; Design optimization; Doping profiles; Jacobian matrices; Leakage current; MOSFET circuits; Research and development; Saturn; Silicon; Stability;

English

ieee

Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on

conf

10.1109/NUPAD.1990.748274

748274