Title :
Numerical Integral Method For 2d Diffusion Simulation
Author :
Tian, Xiaowei ; Strojwas, Andrzej J.
Author_Institution :
Carnegie Mellon University
Keywords :
Boron; Circuit simulation; Computational modeling; Differential equations; Finite difference methods; Finite element methods; Impurities; Integral equations; Interpolation; Nonlinear equations;
Conference_Titel :
Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on
DOI :
10.1109/NUPAD.1990.748279
