Title :
Diffusion Simulation Using Boundary-fitted Coordinate Transformation
Author :
Konishi, Noritoshi ; Nakamura, Mitsutoshi ; Amakawa, Hirotaka
Author_Institution :
Toshiba Corporation
Keywords :
Boron; Ear; Etching; Glass; Impurities; Oxidation; Poisson equations; Shape; Silicon; Ultra large scale integration;
Conference_Titel :
Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on
DOI :
10.1109/NUPAD.1990.748286
