DocumentCode

2597435

Title

Diffusion Simulation Using Boundary-fitted Coordinate Transformation

Author

Konishi, Noritoshi ; Nakamura, Mitsutoshi ; Amakawa, Hirotaka

Author_Institution

Toshiba Corporation

fYear

1990

fDate

3-4 Jun 1990

Firstpage

79

Lastpage

80

Keywords

Boron; Ear; Etching; Glass; Impurities; Oxidation; Poisson equations; Shape; Silicon; Ultra large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on

Type

conf

DOI

10.1109/NUPAD.1990.748286

Filename

748286