Title :
Low temperature assembly method of microfluidic bio-molecules detection device
Author :
van Loo, S. ; Stoukatch, S. ; Axisa, F. ; Destiné, J. ; Van Overstraeten-Schlögel, N. ; Flandre, D. ; Lefèvre, O. ; Mertens, P.
Author_Institution :
EMMI/Microsys, Univ. de Liege, Liege, Belgium
Abstract :
We developed a microfluidic device for the detection of bio-molecules. The active part of the device is a biofunctionalized interdigitated capacitive sensor. The microsystem consists of a sensor on silicon chip, a microfluidic channel formed by photo-patternable resist and a plastic cover. We implemented a low temperature packaging process to assemble the sensor and prevent the biological material from degradation.
Keywords :
biosensors; capacitive sensors; cryogenic electronics; elemental semiconductors; microfluidics; molecular biophysics; semiconductor device packaging; silicon; Si; biofunctionalized interdigitated capacitive sensor; biological material; biomolecules detection; low temperature assembly method; low temperature packaging; microfluidic channel; microfluidic device; microsystem; photo-patternable resist; plastic cover; sensor assembly; Assembly; Bonding; Microfluidics; Silicon; Temperature sensors; Wires; bio-packaging; biocompatibility; low temperature assembly; microfluidics;
Conference_Titel :
Low Temperature Bonding for 3D Integration (LTB-3D), 2012 3rd IEEE International Workshop on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4673-0743-7
DOI :
10.1109/LTB-3D.2012.6238086
