Title :
Mechanical reliability of micron-size solder joints fabricated by explosively reacting nanolayers
Author :
Fujii, T. ; Namazu, T. ; Ohtani, K. ; Fujii, M. ; Inoue, S.
Author_Institution :
Mech. & Syst. Eng., Univ. of Hyogo, Himeji, Japan
Abstract :
In this article, mechanical reliability of solder joints fabricated using Al/Ni reactive film is described. Rectangular solid Si sample with solder-bonded section was prepared for measuring the bond strength using developed four-point bending test equipment. By changing Al/Ni film thickness, interlayer between SnAg solder and Si, and pressure load during bonding, the fracture strength was investigated. In case that 10nm-thick Au/Ni was used as the interlayer, fracture occurred at the interface between the interlayer and Si. On the other hand the specimen with Au/Ni/Cr interlayer fractured at the interface between melted and non-melted SnAg solder. The strength in thick-Al/Ni specimen was higher than that in thin-Al/Ni specimen. It was found that sufficiently melting the solder during Al/Ni flash heating is important for high strength solder joint.
Keywords :
aluminium; bending; fracture toughness; fracture toughness testing; heat treatment; melting; metallic thin films; nanofabrication; nickel; reliability; semiconductor-metal boundaries; silicon; silver alloys; solders; tin alloys; Al-Ni flash heating; SnAg-Al-Ni-Si; bond strength measurement; explosively reacting nanolayers fabrication; film thickness; four-point bending test equipment; fracture strength; high strength solder joint; interlayers; mechanical reliability; melted solder; micron-size solder joints fabrication; nonmelted solder; pressure load; reactive film; rectangular solid Si sample; solder-bonded section; thick-Al-Ni specimen; Bonding; Films; Gold; Heating; Nickel; Silicon; Soldering;
Conference_Titel :
Low Temperature Bonding for 3D Integration (LTB-3D), 2012 3rd IEEE International Workshop on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4673-0743-7
DOI :
10.1109/LTB-3D.2012.6238090