Title :
The design and fabrication of a flexible three-dimensional force sensor skin
Author :
Shan, Jian Hua ; Mei, Tao ; Sun, Lei ; Kong, De Yi ; Zhang, Zheng Yong ; Ni, Lin ; Meng, Max ; Chu, Jia Ru
Author_Institution :
State Key Labs. of Transducer Technol., Chinese Acad. of Sci., Anhui, China
Abstract :
To obtain shear and normal stress information on non-planar surfaces has long been a significant challenge. This paper described a new version of flexible tactile sensor skin for three-dimensional force measurement. The sensor array has been fabricated by MEMS technology. The sensor skin which can be bended 90° includes 4×4 force sensor cells. Each cell is hybrid integrated to flexible printing circuit board which consists of a E-shape diaphragm (50 μm thick and 4000 μm wide). Each cell exhibits a sensitivity of 228 mv/N to normal force and 34 mv/N to shear force in the designed force range of 2N. Design analysis, fabrication processes, and experimental results are presented in this paper.
Keywords :
force measurement; force sensors; micromechanical devices; robots; tactile sensors; MEMS technology; design analysis; fabrication process; flexible tactile sensor skin; force sensor cell; normal stress; printing circuit board; sensor array; shear stress; three-dimensional force measurement; three-dimensional force sensor skin; Fabrication; Force measurement; Force sensors; Integrated circuit technology; Micromechanical devices; Printing; Sensor arrays; Skin; Stress; Tactile sensors; MEMS sensor; flexible skin; three-dimensional force;
Conference_Titel :
Intelligent Robots and Systems, 2005. (IROS 2005). 2005 IEEE/RSJ International Conference on
Print_ISBN :
0-7803-8912-3
DOI :
10.1109/IROS.2005.1545265
