Title :
An expert system for process diagnosis (MOS product testing)
Author :
Hamilton, Andrew ; Schofield, Richard
Author_Institution :
INMOS Ltd., Newport, UK
Abstract :
At INMOS, wafer parametric data for all MOS products are produced using a Keithley parametric test system and stored in a VAX database. A VAX program accesses this database and identifies parametric data to be analyzed. This information is used by another VAX program to run the process diagnosis software on the data. A description of the diagnosis program is given. The system is economical in terms of computer resources, requiring roughly one CPU-minute for the analysis and diagnosis of a zero-yield wafer, and can be run as a low-priority batch job during off-peak periods. Manual input to the system is limited to two components, namely, the regular probing of zero-yield product, and the updating of diagnosis tables when a new failure mechanism is identified.
Keywords :
MOS integrated circuits; automatic testing; electronic engineering computing; expert systems; integrated circuit testing; INMOS; Keithley parametric test system; MOS products; VAX database; expert system; failure mechanism; low-priority batch job; process diagnosis; wafer parametric data; zero-yield wafer; Data analysis; Data mining; Databases; Diagnostic expert systems; Fabrication; Integrated circuit yield; Manufacturing; Measurement standards; Probes; System testing;
Conference_Titel :
Microelectronic Test Structures, 1989. ICMTS 1989. Proceedings of the 1989 International Conference on
Print_ISBN :
0-87942-714-0
DOI :
10.1109/ICMTS.1989.39281
