Title :
Failure Mechanism in Silicon
Author :
Mann, J.F. ; Sandler, N.P.
Author_Institution :
Pacific Semiconductors, Inc., Lawndale, California
Keywords :
Boron; Capacitive sensors; Failure analysis; Genetic expression; Impurities; Lattices; Sandblasting; Semiconductor device reliability; Semiconductor devices; Silicon;
Conference_Titel :
Physics of Failure in Electronics, 1963. Second Annual Symposium on the
Conference_Location :
Chicago, IL, USA
DOI :
10.1109/IRPS.1963.362242