• DocumentCode
    2598045
  • Title

    ICMTS 1989. Proceedings of the 1989 International Conference on Microelectronic Test Structures (Cat. No.89CH2693-0)

  • fYear
    1989
  • fDate
    13-14 March 1989
  • Keywords
    electronic equipment testing; integrated circuit testing; reliability; data analysis; device parameter extraction; dimensional characterization; geometry; microelectronic test structures; misalignment; reliability; test circuits;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures, 1989. ICMTS 1989. Proceedings of the 1989 International Conference on
  • Conference_Location
    Edinburgh, UK
  • Print_ISBN
    0-87942-714-0
  • Type

    conf

  • DOI
    10.1109/ICMTS.1989.39290
  • Filename
    39290
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2598045