DocumentCode :
2598045
Title :
ICMTS 1989. Proceedings of the 1989 International Conference on Microelectronic Test Structures (Cat. No.89CH2693-0)
fYear :
1989
fDate :
13-14 March 1989
Keywords :
electronic equipment testing; integrated circuit testing; reliability; data analysis; device parameter extraction; dimensional characterization; geometry; microelectronic test structures; misalignment; reliability; test circuits;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronic Test Structures, 1989. ICMTS 1989. Proceedings of the 1989 International Conference on
Conference_Location :
Edinburgh, UK
Print_ISBN :
0-87942-714-0
Type :
conf
DOI :
10.1109/ICMTS.1989.39290
Filename :
39290
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2598045
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