DocumentCode

2598335

Title

Silicon Surface Passivation: Materials and Micro Properties

Author

Dzimianski, J.W. ; Pemsel, E.R. ; Lytle, W.J. ; Skinner, S.M.

Author_Institution

Air Arm Division, Westinghouse Electric Company, Baltimore, Maryland

fYear

1963

fDate

Sept. 1963

Firstpage

450

Lastpage

466

Keywords

Crystallization; Electrons; Etching; Hafnium; Passivation; Probes; Semiconductor device packaging; Silicon compounds; Surface cleaning; Surface contamination;

fLanguage

English

Publisher

ieee

Conference_Titel

Physics of Failure in Electronics, 1963. Second Annual Symposium on the

Conference_Location

Chicago, IL, USA

ISSN

0097-2088

Type

conf

DOI

10.1109/IRPS.1963.362260

Filename

4207611