Soft tactile sensor arrays for micromanipulation

Micromanipulation methods used for complicated tasks such as microrobot assembly and microvascular surgery often lack the force reflection and contact localization capability necessary to achieve robust grasps of micro-scale objects without applying excessive forces. This absence of haptic feedback is especially prohibitive in cases where visual evidence of force application, such as object surface deformation, is imperceptible and where unstructured, dynamically changing environments require force sensing and modulation for safe, atraumatic object manipulation. This paper describes the design, fabrication, and experimental validation of a soft tactile sensor array for sub-millimeter contact localization and contact force measurement during micromanipulation. The geometry and placement of conductive liquid embedded channels within the sensor array are optimized to provide adequate sensitivity for representative micro-manipulation tasks. Mechanical testing of the sensor demonstrates a sensitivity of less than 50mN and contact localization resolution on the order of 100´s of microns.