DC-70 GHz, 90-nm 3D CMOS SPDT using elevated CPW and CPS series stubs

Summary form only given, as follows. This paper proposes a new approach for realizing a compact SPDT switch incorporating compact, elevated coplanar waveguide (ECPW) series stubs in conjunction with CPS series stubs in order to extend the operating frequency. The design technique has been successfully demonstrated using a multi-layer 90nm CMOS process. The proposed SPDT switch takes advantage of the multi-level metallization processes offered in CMOS technology. The intrinsic area of the fabricated 3D SPDT switch is reduced.