Title :
Progress in all-solid-state deep-ultraviolet lasers
Author :
Oka, Michio ; Masuda, Hisashi ; Kikuchi, Hiroki ; Kubota, Shigeo
Author_Institution :
Res. Center, Sony Corp., Tokyo, Japan
Abstract :
High power deep ultraviolet (UV) radiation has attracted much attention in areas such as photo-lithography. We report progress in improving the quality of Czochralski-grown β-BaB2O4 (BBO) which is essential for generating high average output power in the deep ultraviolet regime. In order to evaluate our CZ grown BBO, a flash-lamp pumped Q-switched Nd:YAG laser (Quantel YG-682S) was employed
Keywords :
Q-switching; barium compounds; crystal growth from melt; flash lamps; neodymium; optical pumping; photolithography; solid lasers; β-BaB2O4; BaB2O4; CZ grown BBO; Czochralski-grown; Quantel YG-682S; YAG:Nd; YAl5O12:Nd; all-solid-state deep-ultraviolet lasers; deep UV radiation; flash-lamp pumped Q-switched Nd:YAG laser; high average output power; photo-lithography; Coatings; Crystals; Diodes; Frequency; Laser noise; Light sources; Lithography; Optical pumping; Optical scattering; Resonance;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1996. LEOS 96., IEEE
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-3160-5
DOI :
10.1109/LEOS.1996.571923
