DocumentCode

2599277

Title

Reliability Phenomena in Aluminum Metalizations on Silicon Dioxide

Author

Berger, W.M. ; Keen, R.S. ; Schnable, G.L.

Author_Institution

Philco Corporation, Lansdale Division, Lansdale, Pennsylvania

fYear

1965

fDate

Nov. 1965

Firstpage

1

Lastpage

31

Keywords

Aluminum; Circuit testing; Conductivity; Dielectrics; Integrated circuit reliability; Life testing; MOS devices; Silicon compounds; Temperature; Thermal stresses;

fLanguage

English

Publisher

ieee

Conference_Titel

Physics of Failure in Electronics, 1965. Fourth Annual Symposium on the

Conference_Location

Chicago, IL, USA

ISSN

0097-2088

Type

conf

DOI

10.1109/IRPS.1965.362312

Filename

4207669