DocumentCode :
2600517
Title :
Failure mechanisms in mems
Author :
Walraven, Jeremy A.
Author_Institution :
Sandia National Laboratories
Volume :
1
fYear :
2003
fDate :
Sept. 30-Oct. 2, 2003
Firstpage :
828
Lastpage :
833
Keywords :
Contamination; Corrosion; Failure analysis; Fatigue; Microelectromechanical devices; Micromechanical devices; Micromirrors; Surface charging; Surface cracks; Taxonomy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Test Conference, 2003. Proceedings. ITC 2003. International
ISSN :
1089-3539
Print_ISBN :
0-7803-8106-8
Type :
conf
DOI :
10.1109/TEST.2003.1270915
Filename :
1270915
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2600517
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