• DocumentCode
    2600568
  • Title

    Advances in silicon photonics

  • Author

    Liu, A.

  • fYear
    2004
  • fDate
    4-6 Oct. 2004
  • Firstpage
    7
  • Abstract
    Silicon photonics based on silicon-on-insulator (SOI) has recently attracted a great deal of attention since it offers an opportunity for low cost solutions for various applications ranging from telecommunications to chip-to-chip interconnects. As single crystal silicon exhibits no linear electro-optic effect, design and fabrication of a high-speed silicon optical modulator with bandwidth exceeding 1 GHz are very challenging. In this presentation we will review the recent demonstration of a fast (GHz) silicon optical modulator based on a metal-oxide-semiconductor (MOS) capacitor. We will present the device design, fabrication, and characterization. We will also discuss the modulation bandwidth and phase efficiency scaling for higher speed applications. Finally, we will give an overview of recent development in other silicon photonics related topics and challenges.
  • Keywords
    MOS capacitors; electro-optical effects; electro-optical modulation; elemental semiconductors; high-speed optical techniques; optical design techniques; optical fabrication; optical materials; semiconductor devices; silicon; silicon-on-insulator; Si; chip-to-chip interconnects; device characterization; device design; device fabrication; electro-optic effect; high-speed silicon modulator; higher speed applications; metal-oxide-semiconductor capacitor; modulation bandwidth; optical modulator; phase efficiency scaling; silicon photonics; silicon-on-insulator; single crystal silicon; telecommunications; Bandwidth; Costs; Electrooptic modulators; High speed optical techniques; Optical design; Optical device fabrication; Optical interconnections; Optical modulation; Photonic crystals; Silicon on insulator technology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Photonics, 2004. MWP'04. 2004 IEEE International Topical Meeting on
  • Print_ISBN
    0-7803-8491-1
  • Type

    conf

  • DOI
    10.1109/MWP.2004.1396821
  • Filename
    1396821