Title :
Three Dimensional Integrated Circuits: Epitaxial Lift Off GaAs Photodetectors Integrated Directly On Top Of Silicon Circuits
Author :
Camperi-Ginestet, C. ; Kim, Y.W. ; Jokerst, N.M. ; Allen, M.G. ; Brooke, M.A.
Author_Institution :
Georgia Institute of Technology
fDate :
July 29 1992-Aug. 12 1992
Keywords :
Circuit testing; Etching; Gallium arsenide; Gold; Integrated circuit interconnections; Optical arrays; Photodetectors; Polyimides; Silicon; Thin film devices;
Conference_Titel :
Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, Smart Pixels, LEOS 1992 Summer Topical Meeting Digest on
Conference_Location :
Santa Barbara, CA, USA
DOI :
10.1109/LEOSST.1992.697487
