Title :
The Effect of Cleanliness on Integrated Circuit Reliability
Author :
Cannon, D.L. ; Trapp, O.D.
Author_Institution :
Univ. of Houston, Houston, Texas
Abstract :
In order to produce reliable high yield integrated circuits, it is imperative that the device be "clean" or free of contaminants. The effect on device stability of the cleaning solvents, deionized water, trichloroethylene (TCE) and isopropyl alcohol (IPA) has been investigated. An "industry standard" solvent, trichloroethylene, can have deleterious effects on device stability if used improperly. The effective Conductivity Decay Trace tool is described.
Keywords :
Cleaning; Conductivity; Contamination; Current measurement; Integrated circuit reliability; Integrated circuit yield; Pollution measurement; Solvents; Water pollution; Water resources;
Conference_Titel :
Reliability Physics Symposium, 1967. Sixth Annual
Conference_Location :
Los Angeles, CA, USA
DOI :
10.1109/IRPS.1967.362396
