DocumentCode
2600751
Title
The Effect of Cleanliness on Integrated Circuit Reliability
Author
Cannon, D.L. ; Trapp, O.D.
Author_Institution
Univ. of Houston, Houston, Texas
fYear
1967
fDate
Nov. 1967
Firstpage
68
Lastpage
79
Abstract
In order to produce reliable high yield integrated circuits, it is imperative that the device be "clean" or free of contaminants. The effect on device stability of the cleaning solvents, deionized water, trichloroethylene (TCE) and isopropyl alcohol (IPA) has been investigated. An "industry standard" solvent, trichloroethylene, can have deleterious effects on device stability if used improperly. The effective Conductivity Decay Trace tool is described.
Keywords
Cleaning; Conductivity; Contamination; Current measurement; Integrated circuit reliability; Integrated circuit yield; Pollution measurement; Solvents; Water pollution; Water resources;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1967. Sixth Annual
Conference_Location
Los Angeles, CA, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1967.362396
Filename
4207759
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