DocumentCode
2601014
Title
Electron Microprobe Techniques for Failure Analysis of Silicon Planar Devices
Author
Cline, James E. ; Schwartz, Seymour
Author_Institution
Failure Mechanisms Branch, Qualifications and Standards Laboratory, Electronic Components Research; Electronics Research Center, National Aeronautics and Space Administration, Cambridge, Massachusetts
fYear
1967
fDate
Nov. 1967
Firstpage
193
Lastpage
200
Keywords
Aluminum; Character generation; Chemical analysis; Electron emission; Failure analysis; Gold; Integrated circuit metallization; Laboratories; Qualifications; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1967. Sixth Annual
Conference_Location
Los Angeles, CA, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1967.362412
Filename
4207775
Link To Document