Title :
Combining Digital Optical MEMS, CMOS and Algorithms for Unique Display Solutions
Author_Institution :
Texas Instrum., Plano
Abstract :
The binary electrostatic actuation of a MEMS micromirror through relatively large rotation angles by a single, low- voltage SRAM cell forms the basis of a digital optical MEMS switch, or DMD pixel, that is fast, scalable, producible and reliable. Arrays of DMD pixels are monolithically integrated on a CMOS chip and combined with optics, algorithms and a light source to produce unique DLPreg front projection and HDTV products. Examples include DLP pocket-class mobile projectors, 3-D enabled DLP HDTVs and DLP Cinemareg projectors.
Keywords :
CMOS integrated circuits; SRAM chips; micro-optomechanical devices; microswitches; CMOS chip; binary electrostatic actuation; digital optical MEMS switch; low- voltage SRAM cell; Displays; Electrostatic actuators; HDTV; Integrated optics; Micromechanical devices; Micromirrors; Microswitches; Optical arrays; Random access memory; Voltage;
Conference_Titel :
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4244-1507-6
Electronic_ISBN :
978-1-4244-1508-3
DOI :
10.1109/IEDM.2007.4418852
