• DocumentCode
    2602009
  • Title

    Electrical Continuity Testing of Passivated Metallization by Scanning Electron Microscopy

  • Author

    Lukianoff, G.V. ; Mullaney, R.C.

  • Author_Institution
    IBM Components Division, East Fishkill Facility, Hopewell Junction, New York 12533
  • fYear
    1970
  • fDate
    25659
  • Firstpage
    244
  • Lastpage
    246
  • Keywords
    Conducting materials; Contacts; Electron beams; Electron optics; Inspection; Metallization; Probes; Scanning electron microscopy; Semiconductor device testing; Semiconductor devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1970. 8th Annual
  • Conference_Location
    Las Vegas, NV, USA
  • ISSN
    0735-0791
  • Type

    conf

  • DOI
    10.1109/IRPS.1970.362466
  • Filename
    4207832
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2602009