DocumentCode

2602464

Title

Reliability of A12O3-SiO2 IGFET Integrated Circuits

Author

Cheney, G.T. ; Freyman, R.L. ; Mammele, A.A.

Author_Institution

Bell Telephone Laboratories, Inc., 555 Union Boulevard, Allentown, Pennsylvania 18103

fYear

1971

fDate

25993

Firstpage

62

Lastpage

66

Keywords

Clocks; Dielectric devices; Dielectric substrates; Encapsulation; Integrated circuit reliability; Jacobian matrices; Metallization; Palladium; Stress; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium, 1971. 9th Annual

Conference_Location

Las Vegas, NV, USA

ISSN

0735-0791

Type

conf

DOI

10.1109/IRPS.1971.362493

Filename

4207862