• DocumentCode
    2602513
  • Title

    Fabrication and Characterization of Carbon Nanotube Interconnects

  • Author

    Close, Gael F. ; Wong, H. S Philip

  • Author_Institution
    Stanford Univ., Stanford
  • fYear
    2007
  • fDate
    10-12 Dec. 2007
  • Firstpage
    203
  • Lastpage
    206
  • Abstract
    We have fabricated arrays of individual metallic multi-wall carbon nanotube interconnects. We have also collected about two hundred resistance measurements to compare four different contact metals: Al, Au, Ti and Pd. Au and Pd contacts gave the lowest resistance. To validate the concept of high-speed carbon nanotube (CNT) interconnect, we have extended our electrical measurements of individual multi-wall carbon nanotubes (MWCNTs) into the radio-frequency regime up to 15 GHz. We also discuss the reasons why the conductivity of commercial MWCNTs is not yet competitive with copper.
  • Keywords
    carbon nanotubes; electric resistance measurement; integrated circuit interconnections; C; carbon nanotube interconnects; contact metals; electrical measurements; high-speed CNT interconnects; metallic multiwall carbon nanotube; resistance measurements; Carbon nanotubes; Conductivity; Contact resistance; Copper; Electric resistance; Electric variables measurement; Electrical resistance measurement; Fabrication; Gold; Radio frequency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2007. IEDM 2007. IEEE International
  • Conference_Location
    Washington, DC
  • Print_ISBN
    978-1-4244-1507-6
  • Electronic_ISBN
    978-1-4244-1508-3
  • Type

    conf

  • DOI
    10.1109/IEDM.2007.4418902
  • Filename
    4418902