DocumentCode

2602883

Title

CMOS Devices - High-Performance Devices

Author

Natarajan, Sanjay ; Steegen, An

Author_Institution

Intel Corporation

fYear

2007

fDate

10-12 Dec. 2007

Firstpage

271

Lastpage

271

Keywords

Annealing; CMOS technology; Dielectrics; Electrodes; FETs; Hafnium; National electric code; Paper technology; Surface-mount technology; Surfaces;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 2007. IEDM 2007. IEEE International

Conference_Location

Washington, DC

Print_ISBN

978-1-4244-1507-6

Electronic_ISBN

978-1-4244-1508-3

Type

conf

DOI

10.1109/IEDM.2007.4418920

Filename

4418920