DocumentCode :
2603257
Title :
Reliability of Molybdenum Thin Films in Humid Atmospheres
Author :
Hornung, A.
Author_Institution :
IBM Components Division, East Fishkill Facility, Hopewell Junction, New York 12533
fYear :
1972
fDate :
26390
Firstpage :
149
Lastpage :
154
Abstract :
The effect of temperature and relative humidity on the corrosion rate of molybdenum thin films are discussed. The subject of acceleration factors and critical relative humidity for devices using this film is also addressed. A model is presented to explain the observed results.
Keywords :
Acceleration; Atmosphere; Corrosion; Electric variables measurement; Electrical resistance measurement; Humidity; Scanning electron microscopy; Temperature; Testing; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium, 1972. 10th Annual
Conference_Location :
Las Vegas, NV, USA
ISSN :
0735-0791
Type :
conf
DOI :
10.1109/IRPS.1972.362543
Filename :
4207915
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2603257
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