Fabrication of lenses for AlGaInP LEDs using Step and Flash Imprint lithography

Author

Kettle, Jeff ; Lalev, Georgi ; Dimov, Stefan ; Perks, Richard

Author_Institution

Manuf. Eng. Centre, Cardiff Univ., Cardiff

fYear

2007

fDate

2-5 Aug. 2007

Firstpage

49

Lastpage

52

Abstract

This paper describes a new data preparation technique, which allows for the design of optical lenses in a conventional CAD package and immediate transfer to a lithographic system, for example Electron Beam or Focused Ion Beam Lithography. Most importantly, we show that this approach could be used to fabricate lens arrays in templates for Step-and Flash Imprint lithography onto 4iquestwafers. One application for this is to enhancing AlGaInP LED performance by texturing the top current spreading layer.

Keywords

CAD; aluminium compounds; gallium compounds; indium compounds; integrated optics; integrated optoelectronics; lenses; light emitting diodes; optical design techniques; optical fabrication; soft lithography; AlGaInP; CAD package; LED; electron beam lithography; focused ion beam lithography; optical lenses; step-and flash imprint lithography; top current spreading layer; Design automation; Electron optics; Lenses; Light emitting diodes; Lithography; Optical design; Optical design techniques; Optical device fabrication; Packaging; Particle beam optics; LED; focused ion beam; light emitting diode; nano-imprinting; optoelectronics;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on

Conference_Location

Hong Kong

Print_ISBN

978-1-4244-0607-4

Electronic_ISBN

978-1-4244-0608-1

Type

conf

DOI

10.1109/NANO.2007.4601138

Filename

4601138