DocumentCode
2603890
Title
Failure Analysis of Oxide Defects
Author
Ebel, G.H. ; Engelke, H.A.
Author_Institution
Singer Kearfott Division, 150 Totowa Road, Wayne, N.J.
fYear
1973
fDate
26755
Firstpage
108
Lastpage
116
Abstract
There have been many good papers presented on various failure analysis techniques for studying oxide defects. This paper will review some of these and will describe, in detail, the application of nematic liquid crystals to the problem of locating pinholes in oxide layers. Methods of isolating the defective area will also be covered. Some problems caused by the use off deposited oxide scratch coating and a method of removing these coatings without removing the underlying metalization are also discussed.
Keywords
Aluminum; Circuit faults; Coatings; Electron beams; Failure analysis; Large scale integration; Liquid crystals; Probes; Process control; Resists;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1973. 11th Annual
Conference_Location
Las Vegas, NV, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1973.362580
Filename
4207955
Link To Document