Title :
Use of a Pulse Laser Technique in Failure Analysis
Author_Institution :
IBM System Products Division, East Fishkill Facility, Hopewell Junction, New York 12533
Keywords :
Failure analysis; Gas lasers; Laser beam cutting; Laser beams; Microscopy; Monitoring; Optical pulses; Power lasers; Silicon; TV;
Conference_Titel :
Reliability Physics Symposium, 1973. 11th Annual
Conference_Location :
Las Vegas, NV, USA
DOI :
10.1109/IRPS.1973.362582
