DocumentCode

2603929

Title

Use of a Pulse Laser Technique in Failure Analysis

Author

Reese, W.E.

Author_Institution

IBM System Products Division, East Fishkill Facility, Hopewell Junction, New York 12533

fYear

1973

fDate

26755

Firstpage

124

Lastpage

126

Keywords

Failure analysis; Gas lasers; Laser beam cutting; Laser beams; Microscopy; Monitoring; Optical pulses; Power lasers; Silicon; TV;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium, 1973. 11th Annual

Conference_Location

Las Vegas, NV, USA

ISSN

0735-0791

Type

conf

DOI

10.1109/IRPS.1973.362582

Filename

4207957