Title :
Failure Analysis using the Electron Microprobe
Author_Institution :
Bell Laboratories, 555 Union Boulevard, Allentown, Pa. 18103
Abstract :
The electron microprobe is an extremely useful diagnostic tool. It is capable of performing both qualitative and quantitative analysis, and may also provide information on chemical valence state. The analyses are rapid and nondestructive, and may be obtained on an extremely local scale, typically 1-2 cubic microns.
Keywords :
Chemical analysis; EMP radiation effects; Electron beams; Energy resolution; Failure analysis; Optical microscopy; Photonic crystals; Scanning electron microscopy; X-ray detection; X-ray detectors;
Conference_Titel :
Reliability Physics Symposium, 1973. 11th Annual
Conference_Location :
Las Vegas, NV, USA
DOI :
10.1109/IRPS.1973.362594
