Failure Analysis using the Ion Microprobe

The ion microprobe is a relatively new analytical tool, which has by far the greatest sensitivity, and perhaps even a greater potential as a diagnostic tool for failure analysis, than the previous techniques described. Whereas detection limits are typically 1018 atom/cc for the EMP, detection limits for the ion microprobe may be as low as 1013 atom/cc. It may be used to analyze a sample in depth and can do point analysis in regions almost as small as the EMP.