Pattern deposition of electrosprayed polymer nanoparticles

Nanoparticles play an important role in applications, such as field emission display, drug delivery and antireflection coatings etc. Aided electrical field, which is generated by positive charges on the insulated photoresist, is introduced in this paper to deposit as-sprayed polymer nanoparticles to the patterned area of the substrate. The experiment results demonstrate that when the solution concentration of polyethylene oxide (PEO) is smaller than 6%, spherical nanoparticles can be electrosprayed from spinneret and the polymer nanoparticles which diameter is about 350 nm are successfully deposited onto the patterned areas, such as bar, rectangle and circle, due to the electrostatic interactions between positive charges on the photoresist, induced negative charges from silicon and the as-sprayed PEO nanoparticles. Furthermore the mean diameter of PEO nanoparticles is increased with the concentration increasing, but decreased with the electrospray voltage.