Title :
Current-induced breakdown of carbon nanofibers for interconnect applications
Author :
Kitsuki, Hirohiko ; Suzuki, Makoto ; Ngo, Quoc ; Gleason, Kristofer ; Wilhite, Patrick ; Cassell, Alan M. ; Li, Jun ; Yang, Cary Y.
Author_Institution :
Center for Nanostruct., Santa Clara Univ., Santa Clara, CA
Abstract :
Current-induced breakdown phenomena of carbon nanofibers (CNFs) for future on-chip interconnect applications are presented. Scanning transmission electron microscopy (STEM) techniques are developed to study the structural damage by current stress, including in situ electrical measurement with STEM, and sample-preparation-free STEM imaging. The analysis shows that the breakdown occurs along graphitic layers comprising the CNF and that the maximum current density has strong correlation with electrical resistivity. The effect of heat dissipation into the underlying substrate is also studied using different experimental configurations.
Keywords :
carbon; cooling; current density; electric breakdown; fibres; nanostructured materials; scanning-transmission electron microscopy; C; carbon nanofibers; current density; current-induced breakdown; electrical resistivity; graphitic layers; heat dissipation; on-chip interconnect; scanning transmission electron microscopy; Current measurement; Electric breakdown; Electrodes; Nanoscale devices; Nanostructures; Scanning electron microscopy; Stress; Thermal conductivity; Transmission electron microscopy; USA Councils; carbon nanofibers; current-induced breakdown; scanning electron microscopy (STEM); thermal transport;
Conference_Titel :
Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-0607-4
Electronic_ISBN :
978-1-4244-0608-1
DOI :
10.1109/NANO.2007.4601204
