Dynamics analysis of a modified 3-PRC compliant parallel micromanipulator

The dynamics of a 3-PRC (three-prismatic-revolute-cylindrical) compliant parallel micromanipulator (CPM) is investigated in this paper, which is quite necessary once the high frequency control is concerned. By expressing both potential and kinetic energies of the CPM with the chosen generalized coordinates, the dynamic equation is established through the Lagrangian approach. And the dynamic model is validated by the finite element analysis performed in ANSYS software, where the modal analysis is carried out with the mode shapes and natural frequencies extracted. Moreover, as a further utility of the derived model, the variation tendency of the natural frequency versus the design parameters are obtained as well. The generated results are valuable for both the design and control of a 3-PRC CPM for micro/nano scale manipulation.