• DocumentCode
    2605880
  • Title

    Process Control by Means of Accelerated Testing

  • Author

    Brodeur, Joseph E.

  • Author_Institution
    Fairchild Semiconductor, Mountain View, California
  • fYear
    1975
  • fDate
    27485
  • Firstpage
    255
  • Lastpage
    256
  • Abstract
    High temperature operating life test gives quick feedback on the processes used in fabrication of semiconductor wafers. The relatively high failure rate of the (so-called) freaks is quickly demonstrated in such a test and can indicate a marginal or out of control process. This method of process control concentrates on the initial fallout as a means of determining the reliability of final products. Greater than 150°C stress temperatures should not be applied to plastic encapsulated devices. Since most epoxies have glass transition temperatures in the range of 150°C to 180°C permanent damage to the package could result.
  • Keywords
    Fabrication; Feedback; Glass; Life estimation; Life testing; Plastics; Process control; Semiconductor device testing; Stress; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1975. 13th Annual
  • Conference_Location
    Las Vegas, NV, USA
  • ISSN
    0735-0791
  • Type

    conf

  • DOI
    10.1109/IRPS.1975.362704
  • Filename
    4208085