Title :
In-situ nanorobotic soldering of three-dimensional helical nanobelts using gold nanoink
Author :
Hwang, Gilgueng ; Dockendorf, Cedric ; Bell, Dominik J. ; Dong, Lixin ; Hashimoto, Hideki ; Poulikakos, Dimos ; Nelson, Bradley J.
Author_Institution :
Inst. of Robot. & Intell. Syst., ETH Zurich, Zurich
Abstract :
In this paper, we report an in-situ nanosoldering technique to make electrically conductive interconnections between three-dimensional (3D) helical micro-/nanostructures and electrodes for the nanorobotic assembly of nanoelectromechanical systems (NEMS) using gold nanoparticle ink. 3D helical nanobelts are placed onto pre-fabricated gold electrodes using nanorobotic manipulation inside a scanning electron microscope (SEM), and then deposited with gold nanoparticle ink using fountain-pen method to improve the electrical conductivity. Electrical and mechanical characterization shows the stable reduction of contact resistance and strength of the assembled structures, which is important to build 3D NEMS devices based on nanorobotic assembly.
Keywords :
contact resistance; electrical conductivity; gallium arsenide; gold; indium compounds; industrial manipulators; interconnections; manipulator dynamics; micromanipulators; nanoparticles; nanotechnology; robotic assembly; scanning electron microscopy; semiconductor device manufacture; semiconductor-metal boundaries; soldering; 3D NEMS devices; contact resistance; electrical conductivity; electrically conductive interconnections; fountain-pen method; gold nanoparticle ink; in-situ nanorobotic soldering; nanoelectromechanical systems; nanorobotic assembly; nanorobotic manipulation; scanning electron microscope; three-dimensional helical nanobelts; Assembly systems; Conductivity; Contact resistance; Electrodes; Gold; Ink; Nanoelectromechanical systems; Nanostructures; Scanning electron microscopy; Soldering; Nanorobotic assembly; conductivity; gold nanoparticle ink; helical nanobelt; nanosoldering;
Conference_Titel :
Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-0607-4
Electronic_ISBN :
978-1-4244-0608-1
DOI :
10.1109/NANO.2007.4601309