DocumentCode
2606325
Title
In-situ nanorobotic soldering of three-dimensional helical nanobelts using gold nanoink
Author
Hwang, Gilgueng ; Dockendorf, Cedric ; Bell, Dominik J. ; Dong, Lixin ; Hashimoto, Hideki ; Poulikakos, Dimos ; Nelson, Bradley J.
Author_Institution
Inst. of Robot. & Intell. Syst., ETH Zurich, Zurich
fYear
2007
fDate
2-5 Aug. 2007
Firstpage
813
Lastpage
818
Abstract
In this paper, we report an in-situ nanosoldering technique to make electrically conductive interconnections between three-dimensional (3D) helical micro-/nanostructures and electrodes for the nanorobotic assembly of nanoelectromechanical systems (NEMS) using gold nanoparticle ink. 3D helical nanobelts are placed onto pre-fabricated gold electrodes using nanorobotic manipulation inside a scanning electron microscope (SEM), and then deposited with gold nanoparticle ink using fountain-pen method to improve the electrical conductivity. Electrical and mechanical characterization shows the stable reduction of contact resistance and strength of the assembled structures, which is important to build 3D NEMS devices based on nanorobotic assembly.
Keywords
contact resistance; electrical conductivity; gallium arsenide; gold; indium compounds; industrial manipulators; interconnections; manipulator dynamics; micromanipulators; nanoparticles; nanotechnology; robotic assembly; scanning electron microscopy; semiconductor device manufacture; semiconductor-metal boundaries; soldering; 3D NEMS devices; contact resistance; electrical conductivity; electrically conductive interconnections; fountain-pen method; gold nanoparticle ink; in-situ nanorobotic soldering; nanoelectromechanical systems; nanorobotic assembly; nanorobotic manipulation; scanning electron microscope; three-dimensional helical nanobelts; Assembly systems; Conductivity; Contact resistance; Electrodes; Gold; Ink; Nanoelectromechanical systems; Nanostructures; Scanning electron microscopy; Soldering; Nanorobotic assembly; conductivity; gold nanoparticle ink; helical nanobelt; nanosoldering;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on
Conference_Location
Hong Kong
Print_ISBN
978-1-4244-0607-4
Electronic_ISBN
978-1-4244-0608-1
Type
conf
DOI
10.1109/NANO.2007.4601309
Filename
4601309
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