• DocumentCode
    2606939
  • Title

    EBIC - A Valuable Tool for Semiconductor Evaluation and Failure Analysis

  • Author

    Beall, James R. ; Hamiter, Leon, Jr.

  • Author_Institution
    Martin Marietta Corporation, Denver, Colorado 80201. (303)979-7000
  • fYear
    1977
  • fDate
    28216
  • Firstpage
    61
  • Lastpage
    69
  • Keywords
    Acceleration; Current measurement; Electron beams; Energy dissipation; Failure analysis; Integrated circuit measurements; Position measurement; Radiative recombination; Solids; Surface topography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1977. 15th Annual
  • Conference_Location
    LAs Vegas, NV, USA
  • ISSN
    0735-0791
  • Type

    conf

  • DOI
    10.1109/IRPS.1977.362773
  • Filename
    4208160
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2606939