Probe technologies for micro/nano measurements

Author

Fan, Kuang-Chao ; Chen, Yejin ; Wang, Weili

Author_Institution

Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei

fYear

2007

fDate

2-5 Aug. 2007

Firstpage

989

Lastpage

993

Abstract

Conventional probes for dimensional measurement of parts in macro scale are no more capable for the meso- to micro-sized parts that require accuracy to the degree of 100 nm to 10 nm. This paper will discuss the needs of probe technologies for micro/nano measurements. Both of the non-contact and contact types of probes will be addressed. For the non-contact probe, the principles and applications of focus probe and confocal microscope are introduced. Developed systems show the focus probe can reach to the accuracy of 1 nm and the confocal microscope has 0.1mum accuracy. For the contact type, the fabrication of micro probe tip and a newly developed 3D touch probe are described. Experiment shows the minimum contact force can be as small as 50 muN.

Keywords

nanotechnology; optical microscopes; probes; confocal microscope; contact force; micro/nano measurements; probe technologies; Coordinate measuring machines; Fabrication; Focusing; Manufacturing industries; Micromechanical devices; Microscopy; Nanoelectromechanical systems; Nanotechnology; Optical retarders; Probes; confocal microscope; contact probe; focus probe; micro parts;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on

Conference_Location

Hong Kong

Print_ISBN

978-1-4244-0607-4

Electronic_ISBN

978-1-4244-0608-1

Type

conf

DOI

10.1109/NANO.2007.4601349

Filename

4601349