DocumentCode
2607575
Title
Development of silicon microelectrodes for cochlear implant technology
Author
Parker, Joanna R. ; Harrison, H.Barry ; Clark, Graeme M. ; Patrick, Jim ; Reinhold, Olaf
Author_Institution
Cooperative Res. Centre for Cochlear Implant Speech & Hearing Res., Qld., Australia
fYear
1996
fDate
8-11 Dec 1996
Firstpage
12
Lastpage
15
Abstract
Silicon fabrication technology is being explored as a possible solution to the manufacturing of advanced cochlear implant electrode arrays. Silicon probes have been produced with thickness of 5 μm and coated in Parylene(R) polymer to provide strength. To enable handling they are given a backing of silicone rubber before surgical use. This paper presents some techniques used to produce such silicon microelectrodes
Keywords
hearing aids; microelectrodes; silicon; Parylene polymer coating; Si; cochlear implant electrode array; fabrication technology; silicon microelectrode; silicone rubber backing; surgical device; Cochlear implants; Electrodes; Fabrication; Manufacturing; Microelectrodes; Polymer films; Probes; Rubber; Silicon; Surgery;
fLanguage
English
Publisher
ieee
Conference_Titel
Optoelectronic and Microelectronic Materials And Devices Proceedings, 1996 Conference on
Conference_Location
Canberra, ACT
Print_ISBN
0-7803-3374-8
Type
conf
DOI
10.1109/COMMAD.1996.610046
Filename
610046
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