Developing an Approach to Semiconductor Failure Analysis and Curve Tracer Interpretation

An approach to failure analysis of microelectronic devices is presented. This approach emphasizes the role of the curve tracer as an important tool used to determine what route an analysis should follow. The curve tracer provides information that indicates the nature of the failure mechanism and not just the failure mode, as does functional testing. Therefore, the curve tracer can aid in the decision making process in selecting the proper steps that should be followed to successfully capture the failure mechanism. A general format for failure analysis is outlined in which optional routes exist at decision points, and examples are given as to how the curve tracer can be used to aid in the selection of the appropriate route. It is also shown how several groups of analysis steps can be used to complement each other and thus provide more information about the cause of failure.