DocumentCode :
2607757
Title :
The role of nitrogen incorporation in Hf-based high-k dielectrics: reduction in electron charge traps
Author :
Umezawa, Naoto ; Shiraishi, Kenji ; Torii, Kazuyoshi ; Boero, Mauro ; Chikyow, Toyohiro ; Watanabe, Heiji ; Yamabe, Kikuo ; Ohno, Takahisa ; Yamada, Keisaku ; Nara, Yasuo
Author_Institution :
Nat. Inst. for Mater. Sci., Tsukuba, Japan
fYear :
2005
fDate :
12-16 Sept. 2005
Firstpage :
201
Lastpage :
204
Abstract :
The N incorporation effect in Hf-based high-k gate dielectrics has been studied by the first-principles calculations. Interactions between N atoms and oxygen vacancies (Vos) in HfO2 are investigated. Our calculations show that N atoms favorably occupy nearest neighbor oxygen sites to Vos. As a result, electron charge traps at Vos are remarkably suppressed due to the strong repulsive Coulomb interactions between electrons and negatively charged N3- ions. These results indicate that N incorporation improves positive bias temperature instability (PBTI) in Hf related high-k gate stacks. Moreover, our calculations have also revealed that the Vo formation energy is remarkably reduced by N incorporation.
Keywords :
doping; electron traps; hafnium compounds; high-k dielectric thin films; impurity-vacancy interactions; nitrogen; orbital calculations; reliability; vacancies (crystal); HfO2; N; electron charge traps; first-principles calculations; formation energy; high-k dielectrics; high-k gate stacks; nearest neighbor oxygen sites; nitrogen atoms; nitrogen incorporation; oxygen vacancies; positive bias temperature instability; repulsive Coulomb interactions; Electron traps; Hafnium oxide; High-K gate dielectrics; Lead compounds; Leakage current; Materials science and technology; Nanotechnology; Nitrogen; Photonic band gap; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Device Research Conference, 2005. ESSDERC 2005. Proceedings of 35th European
Print_ISBN :
0-7803-9203-5
Type :
conf
DOI :
10.1109/ESSDER.2005.1546620
Filename :
1546620
Link To Document :
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